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Turbomolecular Vacuum Pump Pdf Free

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MessagePosté le: Sam 1 Oct - 12:46 (2016)
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vapor pressure of around 10<sup>-11</sup> Pa (at 20°C), so the atmosphere stays
pressure, velocity distribution, mean free path, particle velocity, . with diffusion
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A turbomolecular pump is a type of vacuum pump, superficially similar to a
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Key words: Turbomolecular pump, pumping speed, compression ratio, gas rar-
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